Reflectivity Control at Substrate / Photoresist Interface by Inorganic Bottom Anti-Reflection Coating for Nanometer-scaled Devices
نویسندگان
چکیده
منابع مشابه
Low Frequency Bottom Reflectivity from Reflection
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ژورنال
عنوان ژورنال: Transactions on Electrical and Electronic Materials
سال: 2014
ISSN: 1229-7607
DOI: 10.4313/teem.2014.15.3.159